Femtosecond laser-induced micro or nanoscale periodic structure on silica glass is still an area of interest due to its application in manufacturing of optoelectronics devices and medical devices. The study of surface modification in micron level was carried out in using Ti: Sapphire femtosecond laser pulse of pulse duration 100 fs at 800 nm at a repetition rate of 1 kHz. The microchannels are created at different fluence and scanning velocity with the linearly polarized pulse. The variation of the width and the depth are optimized with respect to the laser fluence and scanning velocity. © 2017 IEEE.