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Subthreshold current model of FinFETs based on analytical solution of 3-D Poisson's equation
Published in
2006
Volume: 53
   
Issue: 4
Pages: 737 - 742
Abstract
The potential variation in the channel obtained from analytical solution of three-dimensional (3-D) Poisson's equation is used to calculate the subthreshold current and threshold voltage of fin field-effect transistors with doped and undoped channels. The accuracy of the model has been verified by the data from 3-D numerical device simulator. The variation of subthreshold slope and threshold voltage with device geometry and doping concentration in the channel has been studied. © 2006 IEEE.
About the journal
JournalIEEE Transactions on Electron Devices
ISSN00189383
Open AccessNo
Concepts (10)
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    Computer simulation
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    Electric currents
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    Mathematical models
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    Poisson equation
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    Semiconductor doping
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    Threshold voltage
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    Analytical model
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    FIN FIELD EFFECT TRANSISTOR (FINFET)
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    SUBTHRESHOLD CURRENT
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    Field effect transistors