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Self-cleaning femtosecond laser micromachining of Grooves on Silicon: Effect of methanol immersionPublished in Institute of Electrical and Electronics Engineers Inc.
2018
Pages: 2144 - 2145
In micromachining, the extruded material is re-deposited back on the structured surface. In this work, we report on the advantages and results of fs laser-based surface micromachining of methanol immersed of Si comparing the same with the ambient air. © 2017 IEEE.
Topics: Surface micromachining (67)%67% related to the paper
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About the journal
| Journal | Data powered by TypesetIEEE International Conference on Power, Control, Signals and Instrumentation Engineering, ICPCSI 2017 |
|---|---|
| Publisher | Data powered by TypesetInstitute of Electrical and Electronics Engineers Inc. |
| Open Access | No |
Authors (1)
Concepts (15)
Femtosecond lasers- Methanol
- Micromachining
- Organic solvents
- Power control
- Silicon
- SURFACE MICROMACHINING
- Ambient air
- DEBRIS REMOVAL
- Extruded materials
- FEMTOSECOND LASER MICROMACHINING
- FS LASER
- SELF CLEANING
- Structured surfaces
- Composite micromechanics
