We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented. © 2009 Optical Society of America.

Mahendra Prasad Kothiyal

Electromechanical devices

MEMS

External pressures

MICHELSON

OPTICAL ARRANGEMENT

OUT-OF-PLANE DEFORMATIONS

SHEAROGRAPHY

WORKING DISTANCES

Microsystems

IIT Madras is a public technical and research university located in Chennai, Tamil Nadu. Founded in 1959, it is recognised as an Institute of National Importance.

IIT Madras has been ranked as the top engineering institute in India for four years in a row by the National Institutional Ranking Framework of the MHRD

It currently offers undergraduate, postgraduate and research degrees across 16 disciplines in Engineering, Sciences, Humanities and Management. About 596 faculty belonging to science and engineering departments and centres of the Institute are engaged in teaching, research and industrial consultancy.

IIT Madras

Microscopic TV shearography for characterization of microsystems

Optics Letters

Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinuities, large-deformations, and shape of unpolished surfaces. Multiple-wavelength techniques have been successfully used to overcome the drawbacks associated with single wavelength analysis. The use of colour CCD camera allows simultaneous acquisition of multiple interferograms. The advances in colour CCD cameras and image processing techniques have made the multi-colour interferometry a faster, simpler, and cost-effective tool for industrial applications. This article reviews the recent advances in multi-colour interferometric techniques and their demanding applications for characterization of micro-systems, non-destructive testing, and bio-imaging applications. © 2016 Elsevier Ltd. All rights reserved.

Optics and Lasers in Engineering

Multi-colour microscopic interferometry for optical metrology and imaging applications

White light interferometry is a well-established optical tool for surface metrology of reflective samples. In this work, we discuss a single-shot white light interferometer based on single-chip color CCD camera and Hilbert transformation. The approach makes the measurement dynamic, faster, easier and cost-effective for industrial applications. Here we acquire only one white light interferogram using colour CCD camera and then decompose into its individual components using software. We present a simple Hilbert transformation approach to remove the non-uniform bias associated with the interference signal. The phases at individual wavelengths are calculated using Hilbert transformation. The use of Hilbert transformation introduces phase error which depends on number of fringe cycles. We discuss these errors. Experimental results on reflective micro-scale-samples for surface profiling are presented. © 2015 SPIE.

Proceedings of SPIE - The International Society for Optical Engineering

White light single-shot interferometry with colour CCD camera for optical inspection of microsystems

White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry. In this paper, we combine white light interferometer with a single-chip color CCD camera which makes the measurement faster, simpler, and cost-effective. The red-bluegreen (RGB) color interferogram stored in a computer is then decomposed into its individual components and corresponding phase maps for red, green, and blue components are calculated independently. The usefulness of the technique is demonstrated on reflective micro-scale-samples. © 2015 SPIE.

White light interferometer with color CCD for 3D-surface profiling of microsystems

Single wavelength microscopic speckle interferometry is widely used for deformation, shape and non-destructive testing (NDT) of engineering structures. However the single wavelength configuration fails to quantify the large deformation due to the overcrowding of fringes and it cannot provide shape of a specimen under test. In this paper, we discuss a two wavelength microscopic speckle interferometry using single-chip colour CCD camera for characterization of microsamples. The use of colour CCD allows simultaneous acquisition of speckle patterns at two different wavelengths and thus it makes the data acquisition as simple as single wavelength case. For the quantitative measurement, an error compensating 8-step phase shifted algorithm is used. The system allows quantification of large deformation and shape of a specimen with rough surface. The design of the system along with few experimental results on small scale rough specimens is presented. © 2015 SPIE.

Two-wavelength microscopic speckle interferometry using colour CCD camera

Single wavelength TV holography is a widely used whole-field noncontacting optical method for nondestructive testing (NDT) of engineering structures. However, with a single wavelength configuration, it is difficult to quantify the large amplitude defects due to the overcrowding of fringes in the defect location. In this work, we propose a two wavelength microscopic TV holography using a single-chip color charge-coupled device (CCD) camera for NDT of microspecimens. The use of a color CCD allows simultaneous acquisition of speckle patterns at two different wavelengths and makes the data acquisition as simple as that of the single wavelength case. For the quantitative measurement of the defect, an error compensating eight-step phase-shifted algorithm is used. The design of the system and a few experimental results on small-scale rough specimens are presented. © 2014 Society of Photo-Optical Instrumentation Engineers (SPIE).

Optical Engineering

Use of two wavelengths in microscopic TV holography for nondestructive testing

Characterization of deformation and surface shape is an important parameter in quality testing of micro-objects in view of the functionality, reliability, and integrity of the components. Single-wavelength TV holography is widely used for deformation analysis. However, the single-wavelength TV holographic configuration suffers from overcrowding of fringes for large deformation that sets a limitation due to speckle decorrelation for quantitative fringe analysis. Furthermore, shape cannot be determined when using single wavelength. In this paper, we describe a multiple-wavelength microscopic TV holographic configuration that uses sequentially recorded phase-shifted frames at three different wavelengths before and after deformation of the specimen for evaluation of relatively large deformation fields at the effective wavelengths. Use of multiple wavelengths for deformation and shape evaluation is discussed. The design of the system along with the experimental results on small-scale rough specimens under static load is presented. © 2009 Society of Photo-Optical Instrumentation Engineers.

Journal	Optics Letters
Publisher	Optical Society of America (OSA)
ISSN	01469592
Open Access	No