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Gate recess structure engineering in MESFETs to achieve higher schottky breakdown voltage for switch MMIC applications
Published in
2009
Abstract
In this paper we report for the first time, a method of generating wide gate recess structure in single recess step by the help of a bi-layer lithography technique, which can be used to generate varying gate recess width by varying developmental time. It is established that the gate recess structure decides the schottky breakdown voltages in these devices. The distance from gate edge-to-n+ in the recess structure becomes very critical for high Vb. Commonly, double recessing is used to achieve this, which is more complicated. We have achieved Vb as high as 20Volts using single recess. ©2009 IEEE.
About the journal
Journal2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09
Open AccessNo
Concepts (16)
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    Bi-layer
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    BI-LAYER LITHOGRAPHY
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    Break down voltage
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    Gate edge
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    GATE RECESS
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    Mesfets
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    Schottky
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    STRUCTURE ENGINEERING
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    SWITCH MMIC
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    Electric breakdown
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    Electron devices
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    Lithography
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    Mesfet devices
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    Microwave circuits
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    Semiconductor device manufacture
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    Semiconductor devices