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Design and Fabrication of MEMS Lamellar Grating Actuator for Fourier Transform SpectroscopyPublished in Institute of Electrical and Electronics Engineers Inc.
2018
Design and fabrication of a MEMS device for FTIR application is reported. The design delivers an out-of-plane resonant displacement of 98.5 μm at 30V AC actuation in finite element simulation. Device fabrication is carried out and the characterization is in progress. © 2017 IEEE.
Topics: Fourier transform spectroscopy (54)%54% related to the paper, Displacement (vector) (52)%52% related to the paper, Grating (52)%52% related to the paper and Fabrication (52)%52% related to the paper
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Related Papers (3)
About the journal
| Journal | Data powered by TypesetWRAP 2017 - Workshop on Recent Advances in Photonics |
|---|---|
| Publisher | Data powered by TypesetInstitute of Electrical and Electronics Engineers Inc. |
| Open Access | No |
Authors (1)
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Concepts (9)
Fabrication- Device fabrications
- Finite element simulations
- Fourier transform spectroscopy
- FTIR
- LAMELLAR GRATINGS
- Memsdevices
- Out-of plane
- Fourier transform infrared spectroscopy
