Higher temperature assisted processing of silicon, such as in heat-assisted diamond turning, is often being considered to improve surface integrity. At higher temperatures and under mechanical loading and unloading, caused by the moving tool, silicon deforms plastically often in association with occurrence of phase transformations. This paper investigates such phase transformations in rotational scratching of single crystal (100) ptype silicon with a conical diamond tool under various furnacecontrolled temperatures ranging from room temperature to 500°C and at scratching speeds comparable to that used in the diamond turning process (1 m/s). Phase transformation study, using Raman spectroscopy, at various crystal orientations, show differences in phases formed at various temperatures when compared to that reported in indentation. The tendency to form phases is compared between scratched and diamond turned surfaces at room temperature, and also with that reported at low scratching speeds in the literature. Analysis of depths of the scratched groove indicates that that at temperatures beyond a certain threshold, plastic deformation and significant elastic recovery may be causing shallow grooves. This study is expected to help tune heat-assisted diamond turning conditions to improve surface formation. © Copyright 2017 ASME.