Applications of various glass materials like sodalime, borosilicate and pyrex are growing in the field of micro-electro mechanical systems. Quartz glass composes of pure silicon dioxide which is well- known for its hardness and processing of it would widen the scope of its application in product miniaturization. Micro-Electro Chemical Discharge Machining (μ-ECDM) is a non-conventional hybrid technique which combines the features of Electro Chemical Machining (ECM) and Electro Discharge Machining (EDM). In the present paper, channels are machined using μ-ECDM on 4 mm thick quartz glass with 370 μm diameter stainless steel (SS) tool. Experiments are designed at various levels of voltage (V), electrolyte concentration (wt%C) and duty factor (%DF) for parametric study. Signal to Noise (S/N) ratio and Grey Relational Analysis (GRA) are used to optimize the process parameters to enhance responses individually and simultaneously. The obtained S/N ratio optimized parameters to maximize Material Removal Rate (MRR) are - 60 V, 30 wt%C, 60 %DF resulted in 753 μg/min, to minimize Tool Wear Rate (TWR) are – 40 V, 20 wt%C, 50 %DF resulted in 2.99 μg/min and to minimize width of the channel are- 40 V, 20 wt%C, 60 %DF resulted in 500 μm. The GRA optimized parameters are- 40 V, 20 wt%C and 50 %DF resulting in 81 μg/m of MRR, 2.99 μg/m of TWR and 557.6 μm of width with entropy technique- equal weightage. Further an attempt has been made to machine texture on the quartz surface which is still in its early stages of research. GRA optimized parameters as detailed above are used to machine channels and generate textures of 45° hatch, square hatch and 45° criss-cross hatch on quartz glass. © 2019, Springer Nature B.V.