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Integrated optical rectangular-edge filter devices in SOI
Parimal Sah,
Published in Institute of Electrical and Electronics Engineers Inc.
2017
Volume: 35
   
Issue: 2
Pages: 128 - 135
Abstract
An integrated optical design of a rectangular-edge filter device in 250-nm silicon-on-insulator platform is proposed and demonstrated experimentally. The device is designed with a multimode waveguide (supporting at least two modes) with asymmetric side-wall grating, which is adiabatically interfaced with input/output single-mode waveguides. The input/output access waveguides are terminated with grating couplers for optical characterizations. Design parameters are optimized for a sharp-edge or nearly rectangular-edge filter response in optical C-band (1530 nm ≤ λedge ≤ 1565 nm). The submicron features and the entire footprint of the devices were defined with a single-step e-beam lithography process by using negative-tone resist and subsequent dry etching of ∼ 100 nm by using an inductively coupled reactive ion etching system. All the fabricated devices exhibit a rectangular-edge filter response at λedge ∼ 1560 nm with an edge-extinction of > 40 dB at the rate of 118 dB/nm. The rectangular-edge is followed by a broad pass-band of ∼ 40 nm till the first-order Bragg reflected wavelength of λ B00 ∼ 1600 nm in the transmission characteristics obtained for 1520 nm ≤ λ ≤ 1620 nm. Tunability of a rectangular-edge filter is verified with cladding refractive index change and the observed refractive index sensitivity of the edge is ∼ 18 nm/RIU. The limit of detection for 1-dB transmitted power extinction at λedge of a typical fabricated device is estimated to be 5.3 ×, 10-4 RIU. © 1983-2012 IEEE.
About the journal
JournalData powered by TypesetJournal of Lightwave Technology
PublisherData powered by TypesetInstitute of Electrical and Electronics Engineers Inc.
ISSN07338724
Open AccessNo
Concepts (19)
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    Bandpass filters
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    Bragg gratings
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    Electromagnetic induction
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    Lithography
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    Optical design
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    Photonics
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    Reactive ion etching
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    Refractive index
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    Silicon on insulator technology
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    Waveguides
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    EDGE FILTERS
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    INDUCTIVELY COUPLED REACTIVE ION ETCHINGS
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    Optical characterization
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    REFRACTIVE INDEX CHANGES
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    Refractive index sensitivity
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    Silicon photonics
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    SILICON-ON-INSULATOR PLATFORMS
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    Transmission characteristics
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    Waveguide filters