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Implementation of Bi-layer Lithography on Polymethylmethacrylate achieving sub-10 μm Organic Thin Film Transistors
A. Rajpoot,
Published in Institute of Electrical and Electronics Engineers Inc.
2023
Pages: 1 - 1
Abstract
Implementation of CMOS compatible photo-lithography process on pristine poly (methyl methacrylate) (PMMA) gate dielectric, surpassing the existing incompatibility issues, is demonstrated. A novel bi-layer resist approach is introduced to perform lithography directly over PMMA without being subjected to high-temperature process steps, photo-cross-linking or chemical modification. As a consequence, a two orders of reduction in gate leakage current from 10-7A/cm2 to 10-9A/cm2 with no appreciable change in the dielectric constant ensures the adaptability of bi-layer resist method. Bi-layer lithography on PMMA gate dielectric is implemented to achieve solution processed bottom-gate bottom-contact (BGBC) organic thin film transistors (OTFTs) with sub-10&#x03BC;m channel length. The array of such OTFTs, showing zero switch-on voltage (<italic>V<sub>0</sub></italic>) consistently along with other figures of merit intact is reported. IEEE
About the journal
JournalIEEE Electron Device Letters
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISSN07413106