The atom-transfer radical polymerization of methyl methacrylate at room temperature starting from monolayers of initiators, which are covalently anchored to silicon substrates, is described. The control of layer thickness and molecular weight, a constant graft density, and a narrow molecular weight distribution of the polymers produced provide evidence for a controlled surface-initiated polymerization, and dense surface-attached polymer brushes on the SiO2 surfaces are obtained under mild reaction conditions.