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Characterization of surface topography by confocal microscopy: I. Principles and the measurement system
Makaram Singaperumal, Rajpal Singh Sirohi, Mahendra Prasad Kothiyal
Published in Institute of Physics Publishing
Volume: 11
Issue: 3
Pages: 305 - 314
Surface topography and, in particular, roughness and form, plays an important role in determining the functional performance of engineering parts. The measurement and understanding of surface topography is rapidly attracting the attention of the physicist, the biologist and the chemist as well as the engineer. Optics in general played an important role in measurement and, with the advent of opto-mechatronics, it is once again at the forefront of measurement. In this paper, the principles and performance of a confocal microscope, together with the measurement system, are described. Suitable fixtures are developed and integrated with the computer system for generating three-dimensional surface and form data. Software for data acquisition, analysis of various parameters including new parameters and visualization of surface geometrical features has been developed. Both the intensity and the auto-focus methods are used to measure two-dimensional surface roughness by use of the system and results are presented. The measurement and characterization of three-dimensional surface topography and form error will be presented in part II of this paper.
About the journal
JournalMeasurement Science and Technology
PublisherInstitute of Physics Publishing
Open AccessNo
Concepts (8)
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    Data acquisition
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    Data reduction
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    Measurement errors
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    Optical microscopy
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    Roughness measurement