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A numerical simulation of hole and electron trapping due to radiation in silicon dioxide
Published in AIP
1991
Volume: 70
   
Issue: 8
Pages: 4490 - 4495
Abstract
The one-dimensional Poisson, continuity, and the trap rate equations are solved numerically to study the buildup of charge in silicon dioxide due to radiation. The flat-band voltage shift (ΔVfb) is obtained as a function of total dose, the oxide thickness, the applied gate voltage, and the centroid of the trap distribution. The effect of including electron traps is studied. The results of the simulation are found to compare well with experimental data.
About the journal
JournalJournal of Applied Physics
PublisherAIP
ISSN00218979
Open AccessNo