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81 Publications
43 Journals
Enakshi Bhattacharya
Professor
Department of Electrical Engineering
enakshi@ee.iitm.ac.in (Work)
+91-44 2257 4419 (Work)
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Publications - 81
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Publications (81)
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Publications (81)
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Articles
Enhancement of the sensitivity of pressure sensors with a composite Si/porous silicon membrane
Enakshi Bhattacharya
2007
Conferences
Simple measurement technique for resonance frequency of micromachined cantilevers
Enakshi Bhattacharya
2007
Conferences
A novel polysilicon based process for three terminal surface micromachined cantilever
Enakshi Bhattacharya
2007
Articles
Estimation of stiction force from electrical and optical measurements on cantilever beams
Souvik Basu
,
Anil Prabhakar
and
Enakshi Bhattacharya
2007
Articles
Parameter extraction from simple electrical measurements on surface micromachined cantilevers
Enakshi Bhattacharya
2007 | SPIE
Conferences
Electrical measurement of undercut in surface micromachined structures
Enakshi Bhattacharya
2007
Conferences
Silicon/Porous Silicon composite membrane for high sensitivity pressure sensor
Enakshi Bhattacharya
2007
Conferences
Wafer bonding - A powerful tool for MEMS
Aparna Das Gupta
,
P. R.S. Rao
,
Enakshi Bhattacharya
,
...
,
L. Helen Anitha
(5 authors)
2007
Conferences
Sensitivity and stress in pressure sensors with composite silicon/macroporous silicon membranes
Enakshi Bhattacharya
2007
Conferences
Studies on cantilever based triglyceride biosensor
B. V. Soma Sekhar
,
Enakshi Bhattacharya
and
Anju Chadha
2007
Articles
Physical model for the resistivity and temperature coefficient of resistivity in heavily doped polysilicon
Enakshi Bhattacharya
2006
Articles
Effect of doping concentration on the grain boundary trap density and threshold voltage of polycrystalline SOI MOSFETs
Enakshi Bhattacharya
2006
Articles
Stable passivation technique for high-temperature polycrystalline silicon on insulator MOSFETs for MEMS integration
Enakshi Bhattacharya
2006
Conferences
Stiction force estimation from attachment length and electrostatic measurements on cantilever beams
Enakshi Bhattacharya
,
Souvik Basu
and
Anil Prabhakar
2006
Conferences
Effect of porous silicon formation on stiction in surface micromachined MEMS structures
Enakshi Bhattacharya
,
U. Venu Babu
and
P. R.S. Rao
2005
Conferences
Solid state potentiometric sensor for the estimation of tributyrin and urea
Indranil Basu
,
Raman Venkata Subramanian
,
...
,
Anju Chadha
and
Enakshi Bhattacharya
(5 authors)
2005 | Elsevier
Conferences
Potentiometric biosensors based on silicon and porous silicon
Indranil Basu
,
Raman Venkata Subramanian
,
...
,
Anju Chadha
and
Enakshi Bhattacharya
(5 authors)
2004
Articles
Estimation of triglycerides by a porous silicon based potentiometric biosensor
Indranil Basu
,
Enakshi Bhattacharya
and
Anju Chadha
2003
Conferences
Polysilicon piezoresistive pressure sensor using Silicon-On-Insulator (SOI) approach
Enakshi Bhattacharya
,
Amitava Dasgupta
,
Nandita Dasgupta
,
...
,
Krishnan Balasubramaniam
(6 authors)
2002
Conferences
Contact angle measurements on polysilicon for surface micromachining applications
Enakshi Bhattacharya
,
U. Venu Babu
,
...
,
Phanisri Pradeep Pratapa
and
P. R.S. Rao
(5 authors)
2002
Showing 41-60 of 81 results
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