Temperature and bias dependence of gate leakage current in AlInN/GaN High Electron Mobility Transistor (HEMT) is studied over a wide range of temperature and bias. Poole-Frankel (PF) emission, Fowler-Nordheim (FN) Tunneling, impact ionization and hopping conduction are found to be the dominant leakage mechanisms at different regions of reverse bias. The results suggest that the gate leakage current is governed by not one but several mechanisms depending on the bias and temperature. © 2012 IEEE.