Profiles
Research Units
Publications
Sign Up
Faculty Login
X
Conferences
Tapering and size reduction of single-mode silicon waveguides by maskless RIE
Bijoy Krishna Das
Published in
2012
DOI:
10.1109/OECC.2012.6276776
Pages: 655 - 656
Abstract
Two-step reactive ion etching process has been optimized to demonstrate small cross-section single-mode silicon waveguides. This technique has helped to reduce the insertion loss of compact integrated photonic devices in SOI platform up to 3 dB. © 2012 IEEE.
Topics:
Reactive-ion etching
(58)%
58% related to the paper
,
Silicon on insulator
(57)%
57% related to the paper
,
Silicon photonics
(56)%
56% related to the paper
,
Insertion loss
(53)%
53% related to the paper
and
Silicon
(52)%
52% related to the paper
View more info for "
Tapering and size reduction of single-mode silicon waveguides by maskless RIE
"
Request full-text
Cite
Content may be subject to copyright.
Figures & Tables (3)
References (5)
Related Papers (3)
Journal Details
Authors (1)
Concepts (13)
Related Papers (3)
Conferences
Compact integrated optical directional coupler with large cross section silicon waveguides
2010 | SPIE
Articles
Integrated optical rectangular-edge filter devices in SOI
2017 | Institute of Electrical and Electronics Engineers Inc.
Articles
Integrated Optical Linear Edge Filters Using Apodized Sub-Wavelength Grating Waveguides in SOI
2019 | Institute of Electrical and Electronics Engineers Inc.
About the journal
Journal
Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012
Open Access
No
Authors (1)
Bijoy Krishna Das
Department of Electrical Engineering
Recent publications
Tapering and size reduction of single-mode silicon waveguides by maskless RIE
Compact integrated optical directional coupler with large cross section silicon waveguides
Integrated optical ultra-broadband add-drop filter in silicon-on-insulator platform
Integrated optical rectangular-edge filter devices in SOI
Concepts (13)
INTEGRATED PHOTONIC DEVICES
MASK LESS
REACTIVE ION
SILICON ON INSULATOR
Silicon photonics
SILICON WAVEGUIDE
Single mode
Size reductions
Integrated optics
Photonic devices
Photonics
Silicon on insulator technology
Waveguides
Get all the updates for this publication
Follow