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Reversible p-type conductivity in H passivated nitrogen and phosphorous codoped ZnO thin films using rapid thermal annealing
Published in Elsevier B.V.
2017
Volume: 400
   
Pages: 312 - 317
Abstract
We demonstrate reversible p-type nature of pulsed laser deposited (P, N) codoped ZnO thin films using rapid thermal annealing process. As grown thin films exhibited change in conductivity from p to n-type over a span of 120 days. Non-annealed n-type thin films contain unintentional donor impurities such as hydrogen and carbon. X-ray photoelectron spectroscopy and Raman measurements conclusively show that hydrogen passivates nitrogen acceptors by forming N[sbnd]H complex. Carbon can be annealed out at 600 °C, whereas, the dissociation of N[sbnd]H complex takes place at 800 °C. The films revert its p-type nature at an annealing temperature of 800 °C. © 2016 Elsevier B.V.
About the journal
JournalData powered by TypesetApplied Surface Science
PublisherData powered by TypesetElsevier B.V.
ISSN01694332
Open AccessNo
Concepts (24)
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    Carbon
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    CARBON FILMS
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    Ii-vi semiconductors
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    Metallic films
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    Nitrogen compounds
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    Optical films
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    Optical properties
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    Oxide films
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    Phosphorus
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    Pulsed laser deposition
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    Pulsed lasers
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    Rapid thermal annealing
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    Semiconducting films
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    X ray photoelectron spectroscopy
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    Zinc oxide
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    Annealing temperatures
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    AS-GROWN THIN FILMS
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    Electrical transport
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    HYDROGEN PASSIVATES
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    NITROGEN ACCEPTORS
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    P TYPE CONDUCTIVITY
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    Raman measurements
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    RAPID THERMAL ANNEALING PROCESS
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    Thin films