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Pulsed laser assisted micro-scribing of PCB combined with LIBS based depth monitoring
Published in OSA Publishing
A nanosecond laser ablation combined with LIBS is demonstrated for a micro-scribing of copper film on dielectric material. NaCl solution was used as a laser-activated etchant in the final scan for minimizing the thermal damage. © 2020 IEEE.
About the journal
Journal2020 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2020 - Proceedings
PublisherOSA Publishing
Open AccessNo