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Phase formation and thermal stability of reactively sputtered ytao4–zro2 coatings
Stelzer B., Pingen K., Hans M., Holzapfel D.M., Richter S., Mayer J., , Schneider J.M.
Published in MDPI AG
Volume: 14
Issue: 3
Pages: 1 - 15
Y(1−x)/2Ta(1−x)/2ZrxO2 coatings with 0 to 44 mol% ZrO2 were synthesized by sputtering. Phase-pure M’-YTaO4 coatings were obtained at a substrate temperature of 900◦C. Alloying with ZrO2 resulted in the growth of M’ along with t-Zr(Y,Ta)O2 for ≤15 mol%, while for ≥28 mol%, ZrO2 X-ray diffraction (XRD) phase-pure metastable t was formed, which may be caused by small grain sizes and/or kinetic limitations. The former phase region transformed into M’ and M and the latter to an M’ + t and M + t phase region upon annealing to 1300 and 1650◦C, respectively. In addition to M and t, T-YTa(Zr)O4 phase fractions were observed at room temperature for ZrO2 contents ≥28 mol% after annealing to 1650◦C. T phase fractions increased during in situ heating XRD at 80◦C. At 1650◦C, a reaction with the α-Al2O3 substrate resulted in the formation of AlTaO4 and an Al-Ta-Y-O compound. © 2021 by the authors. Licensee MDPI, Basel, Switzerland.
About the journal
PublisherMDPI AG
Open AccessNo