We report the fabrication of potentiometric electrolyteinsulator capacitor (EISCAP) biosensors based on silicon and porous silicon (PS) substrates with oxide and stacked oxidenitride dielectrics. These biosensors have been calibrated for the detection and estimation of bioanalytes like tributyrin and urea, based on enzymatic reactions and have a linear detection range from 0.1 mM to 20 mM of the bioanalyte concentration. These improved sensitivity EISCAP sensors were used for the estimation of the total acid content in rancid butter, estimation of enzyme (Lipase) activity and to estimate total triglyceride levels in blood serum. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.