TODAY, SINGLE-CELL RESEARCH is of great interest to analyze cell-to-cell or cell-to-environment behavior with their intracellular compounds, where bulk measurements of millions of cells together can provide an average value. To deliver biomolecules in a precise and localized way into single living cells with a high transfection rate and high cell viability is a challenging and promisible task for biological and therapeutic research. © 2007-2011 IEEE.