Diffractive optics has traditionally been used to transform a parallel beam of light into a pattern with a desired phase and intensity distribution. One of the advantages of using diffractive optics is the fact that multiple functions can be integrated into one element. Although, in theory several functions can be combined, the efficiency reduces with each added function. Also, depending on the nature of each function, feature sizes could get finer. Optical lithography with its 1 ?m limit becomes inadequate for fabrication and sophisticated tools such as e-beam lithography and focused ion beam milling are required. In this paper, two different techniques of fabrication of composite elements are studied. A comparison of the beams generated in both cases is presented. © 2014 SPIE.