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Modeling and experimental investigation of an integrated optical microheater in silicon-on-insulator
Saket Kaushal,
Published in OSA - The Optical Society
2016
Volume: 55
   
Issue: 11
Pages: 2837 - 2842
Abstract
A linear piecewise model has been formulated to analyze the performance of a metallic microheater integrated with single-mode waveguides (λ ∼ 1550 nm) in silicon-on-insulator (SOI). The model has been used to evaluate integrated optical microheaters fabricated in a SOI substrate with 2 μm device layer thickness. The Fabry-Perot modulation technique has been used to extract the effective thermo-optic phase shift and response time. The effective thermal power budget of Peff,π ∼ 500 μW(out of actually consumed power Pπ = 1.1 mW) for a π phase shift and a switching time of τ ∼ 9 μs, have been recorded for a typical Ti heater stripe of length LH = 50 μm, width WH = 2 μm, and thickness tH ∼ 150 nm, integrated with a FabrÿCPerot waveguide cavity of length ∼20 mm. It has been shown that the performance of a heater improves (in terms of power budget) as the length of a microheater decreases. However, smaller heater size requires higher joule heating to obtain a desired phase shift, which is again found to be dependent on polarization of the guided mode because of thermal stress. © 2016 Optical Society of America.
About the journal
JournalData powered by TypesetApplied Optics
PublisherData powered by TypesetOSA - The Optical Society
ISSN1559128X
Impact Factor1.230
Open AccessNo
Citation Styleunsrt
Sherpa RoMEO Archiving PolicyGreen
Concepts (16)
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    Budget control
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    Fabry-perot interferometers
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    Heating equipment
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    Microelectromechanical devices
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    Phase shifters
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    Silicon on insulator technology
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    Waveguides
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    Experimental investigations
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    Modulation techniques
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    PIECE-WISE MODELS
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    SILICON-ON- INSULATORS (SOI)
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    SINGLE MODE WAVEGUIDES
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    SOI SUBSTRATES
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    Switching time
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    Waveguide cavity
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    Phase shift