Header menu link for other important links
X
Micro scribing of copper and aluminum thin films in air and water using pulsed Nd3+:YAG laser
Srinagalakshmi Nammi, , G. Balaganesan
Published in Japan Laser Processing Society
2016
Volume: 11
   
Issue: 1
Pages: 46 - 52
Abstract
Micro scribing of copper and aluminum thin films in air and underwater using Q-switched Nd3+:YAG laser has been described. Influence of deionized (DI) water level on the scribed micro channel depth and width has been studied for different wavelengths. Scribing was done by maintaining different levels of DI water at 1mm, 2 mm, 3 mm, 5 mm and 10mm. At 1 mm DI water level and laser pulse energy of 3 mJ, maximum ablation depth of 105 μm was achieved with both 355 nm and 532 nm wavelength for aluminum. Further, the depth achieved in DI water was 6 times greater than that in air for aluminum. On the other hand, for copper film, the depth attained with the laser ablation in DI water was 7 um as compared to 4 um in air for 1064 nm wavelength and 40 mJ of energy. In case of 355 nm and 532 nm the depth attained in air was higher than in DI water for copper. As the DI water level was increased, the depth reduced for both aluminum and copper. A comparative study of the results obtained in both underwater and air media revealed that aluminum can be machined more potently in DI water than in air. Further, theoretical modeling of the laser-material interaction in air as ambience has been discussed to estimate the recession rate by incorporating the laser ablation temperature measured using the laser induced breakdown spectroscopy technique.
About the journal
JournalJournal of Laser Micro Nanoengineering
PublisherJapan Laser Processing Society
ISSN18800688
Open AccessYes
Concepts (20)
  •  related image
    Ablation
  •  related image
    Atomic emission spectroscopy
  •  related image
    Copper
  •  related image
    Deionized water
  •  related image
    Laser ablation
  •  related image
    LASER INDUCED BREAKDOWN SPECTROSCOPY
  •  related image
    Micromachining
  •  related image
    Optical films
  •  related image
    Thin films
  •  related image
    Water levels
  •  related image
    YTTRIUM ALUMINUM GARNET
  •  related image
    ALUMINUM THIN FILMS
  •  related image
    Comparative studies
  •  related image
    Laser micro-machining
  •  related image
    LASER SCRIBING
  •  related image
    LASER-MATERIAL INTERACTIONS
  •  related image
    PARABOLIC REFLECTOR
  •  related image
    Theoretical modeling
  •  related image
    UNDER WATER
  •  related image
    Pulsed lasers