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MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing
Published in
2009
Volume: 9
   
Issue: 12
Pages: 1660 - 1666
Abstract
A novel composite porous silicon/polysilicon microcantilever for biosensing applications with enhanced sensitivity is reported. It is fabricated by surface micromachining of polysilicon cantilevers followed by the formation of the surface porous layer after release by Reaction Induced Vapor Phase Stain Etch. The microcantilevers with porous surface layer are characterized by their morphology that exhibits a dual macro and nanostructure for very effective immobilization of biomolecules. The current work focuses on the fabrication of composite porous silicon/polysilicon microcantilevers, characterization of their morphology and resonance frequency, as well as demonstration of improved immobilization of enzyme resulting in enhanced sensing of triglycerides. © 2009 IEEE.
About the journal
JournalIEEE Sensors Journal
ISSN1530437X
Open AccessNo
Concepts (22)
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    Biosensing
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    Biosensing applications
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    Cantilever sensors
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    Enhanced sensitivity
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    Microcantilevers
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    POROUS LAYERS
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    Porous surface
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    Resonance frequencies
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    TRYGLICERIDE SENSOR
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    Vapor phase
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    Work focus
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    Atomic force microscopy
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    Biosensors
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    Chemical sensors
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    Composite micromechanics
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    Enzyme immobilization
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    Morphology
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    Nanocantilevers
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    Polysilicon
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    Resonance
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    SURFACE MICROMACHINING
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    Porous silicon