The mechanism of reverse gate leakage in AlGaN/GaN high electron mobility transistors was discussed. It was shown that trap-assisted tunnelling dominates below temperature ∼500 K, and direct tunnelling dominates at higher temperatures. The results showed that trap concentration of ∼1013 - 10-3, and trap bandwidth of ∼50%-70% of barrier height located 0.4-0.55 V below the conduction band edge.
Content may be subject to copyright.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publ... ...This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in [Mechanism of the reverse gate leakage in AlGaN/GaN high electron mobility transistors. Applied Physics Letters 82, 22 p3976-3978 (2003)] and may be found at https://doi.org/10.1063/1.1579852.