Header menu link for other important links
X
Knudsen force based MEMS structures
Published in Institute of Physics Publishing
2014
Volume: 24
   
Issue: 4
Abstract
Knudsen forces are gas molecular forces which originate from the differential temperatures in rarefied gases. We report measurements of these forces at normal ambience on test structures made by surface micromachining of polysilicon. Using these results, a surface micromachined Knudsen vacuum sensor has been simulated, fabricated and characterized. The vacuum sensor has an area of 1 mm2. The fabricated device has a sensitivity of 40 fF Pa -1 in the pressure range of 0.1-10 Pa. The measured data is analysed and the magnitude of the Knudsen's force is extracted. The paper also suggests ways to enhance the range and improve the sensitivity of such sensors. © 2014 IOP Publishing Ltd.
About the journal
JournalJournal of Micromechanics and Microengineering
PublisherInstitute of Physics Publishing
ISSN09601317
Open AccessNo
Concepts (12)
  •  related image
    MEMS
  •  related image
    Pressure
  •  related image
    Vacuum
  •  related image
    FABRICATED DEVICE
  •  related image
    KNUDSEN
  •  related image
    Measurements of
  •  related image
    MICRO-MACHINED
  •  related image
    MOLECULAR FORCES
  •  related image
    PRESSURE RANGES
  •  related image
    Test structure
  •  related image
    VACUUM SENSORS
  •  related image
    Sensors