Header menu link for other important links
X
Influence of the Flexure Position and a Thick Gold Film on the Performance of Beam-Mass Structures
S. Vetrivel, Vetrivel S, Anupama Menon B, Mathew R, Ravi Sankar A
Published in Taylor and Francis Ltd
2019
Abstract
In the present work, we realize a miniaturized piezoresistive accelerometer with high magnitude of prime-axis signal and a very low cross-axis signal. Numerical simulations are performed to investigate the electro-mechanical response of three structures with different flexure positions and an electroplated gold layer. Of the three structural configurations, one structure with the proof mass-edge-aligned-beams and an electroplated gold film has better performance with lesser real estate consumption. Experimental results show that a fabricated sensor depicts around 20% improvement in the prime-axis signal and a maximum reduction of 7.6% in the cross-axis signal compared to other structures. © 2019, © 2019 IETE.
About the journal
JournalData powered by TypesetIETE Journal of Research
PublisherData powered by TypesetTaylor and Francis Ltd
ISSN03772063
Open AccessNo
Concepts (11)
  •  related image
    Accelerometers
  •  related image
    Metallic films
  •  related image
    ELECTROMECHANICAL RESPONSE
  •  related image
    ELECTROPLATED GOLD
  •  related image
    FLEXURE POSITION
  •  related image
    Mems accelerometer
  •  related image
    Piezoresistance
  •  related image
    Piezoresistive accelerometers
  •  related image
    REAL ESTATE CONSUMPTION
  •  related image
    STRUCTURAL CONFIGURATIONS
  •  related image
    Gold