Header menu link for other important links
X
Influence of pulsed Nd3+: YAG laser beam profile and wavelength on micro-scribing of copper and aluminum thin films
Srinagalakshmi Nammi,
Published in SPIE
2015
Volume: 9351
   
Abstract
Evenly spaced conductive grids of copper and aluminum thin films on polyamide substrate are used for parabolic reflector-Antennas, aboard telecommunications satellite. In the present paper, laser micro scribing of thin films using a flat-top and Gaussian laser beam profile are analyzed with 95% overlapping of the diameter of the laser spot. Laser scribing is performed using the Q-switched Nd3+: YAG (355, 532 nm) laser. The influence of laser irradiation and beam shape are experimentally analyzed using non-contact optical profilometer and scanning electron microscope (SEM). Laser scribing using flat-top profile produced near rectangular micro channels in copper thin films. Using Gaussian profile the probability of melting is greater than vaporization as observed using SEM images; this melt pool plays a prominent role in re-solidification at the edges. Depth of the scribe channel is observed to be 20% high for 532 nm wavelength compared to 355 nm wavelength. Effect of different environments such as air, water and vacuum on the channel depth and quality is reported. The response of aluminum and copper for high fluences is also studied. Theoretical modeling of the laser-material interaction using Comsol mulitphysics 4.4 is discussed.
About the journal
JournalData powered by TypesetProceedings of SPIE - The International Society for Optical Engineering
PublisherData powered by TypesetSPIE
ISSN0277786X
Open AccessNo
Concepts (22)
  •  related image
    Aluminum compounds
  •  related image
    Antenna reflectors
  •  related image
    Conductive films
  •  related image
    Copper
  •  related image
    Gaussian beams
  •  related image
    Gaussian distribution
  •  related image
    Laser beams
  •  related image
    Optical films
  •  related image
    Parabolic antennas
  •  related image
    Reflection
  •  related image
    Scanning electron microscopy
  •  related image
    Thin films
  •  related image
    YTTRIUM ALUMINUM GARNET
  •  related image
    BEAM-SHAPING
  •  related image
    GAUSSIAN LASERS
  •  related image
    LASER PROFILES
  •  related image
    LASER-MATERIAL INTERACTIONS
  •  related image
    Optical profilometer
  •  related image
    PARABOLIC REFLECTOR ANTENNAS
  •  related image
    Polyamide substrates
  •  related image
    REFLECTOR ANTENNAS
  •  related image
    Pulsed lasers