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Extraction of D31 Piezoelectric Coefficient of AlN Thin Film
Published in IEEE
Volume: 2021-January
Pages: 623 - 625
Piezoelectric materials have the property of electromechanical coupling, which is very useful in Micro Electro Mechanical Systems (MEMS). Aluminium Nitride (AlN) thin film is an ideal candidate for resonators in on-chip front end circuit. The piezoelectric coupling coefficient d31 is responsible for the excitation in longitudinal mode resonators. Direct measurement of the value of d31 is still an area of research. We propose a method to extract the piezoelectric coefficient d31 from the transmission characteristics of a resonator. The average extracted value of d31 is -0.943 pC/N with standard deviation 0.21 pC/N, which is comparable with reported values. © 2021 IEEE.
About the journal
JournalData powered by TypesetProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherData powered by TypesetIEEE
Open AccessNo