Header menu link for other important links
X
Electron microscopic studies and microchemical analysis of Se10Sb10Te80 ternary alloy thin films
V. Damodara das
Published in
1996
Volume: 35
   
Issue: 4 A
Pages: 2234 - 2239
Abstract
Thin Films of thicknesses less than 1000 Å have been deposited in a vacuum of 5 × 10-5 Torr by the very fast evaporation (∼50 Å/s) of the ternary Se10Sb10Te80 bulk alloy pieces onto cleaned glass plates which were held at room temperature vertically above the evaporation source (at a distance of 25 cm). From the energy dispersive X-ray analysis (EDAX) patterns of the films, the presence of Te, Sb and Se has been confirmed and the semi-quantitative content of the constituent elements in the alloy films has been determined. Film specimens for transmission electron microscopy have been detached from these glass substrates by dippping the latter in very dilute HF solution. These film specimens have been examined in an electron microscope. Electron diffraction patterns reveal that the films are not amorphous but are polycrystalline in most of the regions, but also single crystalline in some regions which have a darker contrast in bright field transmission electron micrographs. Analysis of the single crystalline (spot) patterns obtained reveals that the single crystalline microcrystallites in different regions are oriented differently. The orientations of these microcrystallites have been determined.
About the journal
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
ISSN00214922
Open AccessNo
Concepts (19)
  •  related image
    Antimony compounds
  •  related image
    Chemical analysis
  •  related image
    Crystal orientation
  •  related image
    Crystal structure
  •  related image
    Electron beams
  •  related image
    Electron diffraction
  •  related image
    Electron microscopy
  •  related image
    Irradiation
  •  related image
    Thin films
  •  related image
    Transmission electron microscopy
  •  related image
    X ray analysis
  •  related image
    X ray crystallography
  •  related image
    Electron beam irradiation
  •  related image
    Energy dispersive x ray analysis
  •  related image
    MICROCHEMICAL ANALYSIS
  •  related image
    MICROCRYSTALLINE ORIENTATION
  •  related image
    TERNARY SEMICONDUCTOR CHALCOGENIDE
  •  related image
    Vacuum deposition
  •  related image
    Ternary systems