Micro EDM is a nonconventional machining method which has gained researcher's attention during the past decade. After the success in industrial applications of EDM, Focus has been to scale down the entire system to a smaller size. The capability of the process to machine extremely hard and difficult to machine materials has made it a suitable candidate for machining the next generation engineering materials. In this paper, An attempt has been made to develop μEDM setup with piezo actuated tool feed mechanism. The holes are machined on copper plates of thickness 300μm with varying process parameters like voltage, frequency and duty cycle. The design of experiment method has been used to carry out the experiments in a systematic manner. The quality of holes produced is studied using optical microscope and SEM images. the results obtained are presented in this paper. © (2014) Trans Tech Publications, Switzerland.