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Design and Fabrication of Reliable Power Efficient Bistable MEMS Switch Using Single Mask Process
Published in Institute of Electrical and Electronics Engineers Inc.
Volume: 29
Issue: 5
Pages: 1225 - 1233
A bistable DC switch based on buckled beams and thermal actuation has been designed, fabricated and characterised. The buckled beams, which require very low actuation force and provide a sufficiently large contact force, are designed based on a parametric study. U-shaped thermal actuators are designed to provide the actuation force with minimum electrical power. The compact switch is fabricated using a simple single mask process on a SOI wafer. The average switching power is measured to be 60 mW, while the average switching delay is 350 μs. The power-delay product of about 20μ J is the lowest reported so far for bistable MEMS switches based on thermal actuation. The switch retains functionality even after 5 million switching cycles. [2020-0026] © 1992-2012 IEEE.
About the journal
JournalData powered by TypesetJournal of Microelectromechanical Systems
PublisherData powered by TypesetInstitute of Electrical and Electronics Engineers Inc.
Open AccessNo