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Design and fabrication of a micro-mirror for spectroscopy
Published in
2010
Volume: 7594
   
Abstract
A wide variety of MEMS micro-mirrors are being developed for various optical applications. One such application is Fourier Transform Spectrometry (FTS). The design, process optimization and fabrication of a micro-mirror for this application is presented. Large, non-tilting displacements of mirrors are required to achieve high FTS resolution. In order to obtain this without using Deep Reactive Ion Etching (DRIE), the micro-mirrors were fabricated on silicon using bulk micromachining techniques. This paper will present the process developed for fabrication of the mirror with the required specifications. In addition, results of the FTS experiments conducted with the micro-mirror will also be presented. © 2010 Copyright SPIE - The International Society for Optical Engineering.
About the journal
JournalProceedings of SPIE - The International Society for Optical Engineering
ISSN0277786X
Open AccessNo
Concepts (17)
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    BULK- MICROMACHINING
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    Deep reactive ion etching
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    FOURIER TRANSFORM SPECTROMETRY
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    Fourier transform spectroscopy
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    MICRO MIRROR
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    OPTICAL APPLICATIONS
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    Process optimization
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    Composite micromechanics
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    Fabrication
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    Micromachining
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    Mirrors
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    MOEMS
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    Optimization
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    Reactive ion etching
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    Spacecraft instruments
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    Spectroscopy
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    Fourier transforms