This paper reports on design, fabrication and characterization of laterally excited thin film piezoelectric on Silicon (TPoS) MEMS resonators of resonance frequency around 1 GHz. Devices were fabricated on 5 μm SOI and 0.5 μm Aluminium Nitride piezoelectric film. We studied the effect of the number of anchors attached to the resonator and the width of the resonator on Q-factor and motional resistance. Measured characteristics of the device with Phononic crystal (PnC) tether showed a resonance peak at 969.22 MHz with motional resistance 2.9 kΩ and Q-factor of 1998. The motional resistance could be reduced to 770 Ω for wider devices. © 2017 IEEE.

Deleep R. Nair

Department of Electrical Engineering

Amitava Dasgupta

Aluminum nitride

Fabrication

III-V semiconductors

Microelectromechanical devices

Phonons

Piezoelectricity

Q factor measurement

ANCHOR LOSS

LATERAL MODES

MEMS RESONATORS

MOTIONAL RESISTANCE

Phononic Crystal

Q-factors

Resonators

IIT Madras is a public technical and research university located in Chennai, Tamil Nadu. Founded in 1959, it is recognised as an Institute of National Importance.

IIT Madras has been ranked as the top engineering institute in India for four years in a row by the National Institutional Ranking Framework of the MHRD

It currently offers undergraduate, postgraduate and research degrees across 16 disciplines in Engineering, Sciences, Humanities and Management. About 596 faculty belonging to science and engineering departments and centres of the Institute are engaged in teaching, research and industrial consultancy.

IIT Madras

IEEE MTT-S International Microwave and RF Conference, IMaRC 2017

The design, fabrication, and characterization of Piezoelectric-on-Silicon array resonators with asymmetric Phononic crystal (PnC) tethering for applications in high frequency reference oscillators is presented. A hybrid approach of mechanical arraying along with higher mode of operation is used for minimizing the motional resistance. For improving the Q-factor, novel asymmetric PnC tethers are developed that not only exhibit a larger bandgap than their symmetric PnC counterparts, but also have significantly better design optimization capabilities for fine tuning the tether properties. Third order longitudinal mode resonators operating at frequencies of 300 MHz with and without PnC tethering and with different number of resonators in the array were fabricated using 2μm SOI wafers. The measured characteristics of the resonators showed a peak unloaded Q-factor of 4454 and a motional resistance of 200 Ω at 312 MHz for a seven resonator array. These results are comparable with the best reported in literature, in spite of a lesser silicon thickness. © 2016 IEEE.

Journal of Microelectromechanical Systems

Piezoelectric-on-Silicon Array Resonators with Asymmetric Phononic Crystal Tethering

Journal of Applied Physics

Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators

Journal of Micromechanics and Microengineering

A review of MEMS oscillators for frequency reference and timing applications

In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Silicon micromechanical resonators

Design and fabrication of 1 GHz lateral TPoS MEMS resonator for RF front end applications

Journal	Data powered by TypesetIEEE MTT-S International Microwave and RF Conference, IMaRC 2017
Publisher	Data powered by TypesetInstitute of Electrical and Electronics Engineers Inc.
Open Access	No