The growth of defects in vacuum-evaporated MoO3 films has been studied by optical absorption in the present work. The as-grown films were subjected to different kinds of treatment such as thermal annealing, UV and X-ray irradiation, and their optical absorption spectra were recorded between 300 and 1500 nm at room temperature as well as at liquid N2 temperature The films were found to be amorphous from X-ray and electron-microscopic studies. From these studies it is observed that in addition to point defects, defect aggregates similar to the colloidal centres in silver and alkali halides, are present in these films. © 1978.