Diamond-like nanocomposite (DLN) thin films are deposited on glass (pyrex/silicon) substrate by plasma enhanced chemical vapor deposition (PECVD) technique using different combinations of hexamethyldisiloxane (HMDSO) and hexamethyldisilazane (HMDSN) gas precursors. The surface morphology of the DLN films has been investigated by atomic force microscopy (AFM). Nanoparticles on DLN films were analyzed by highresolution transmission electron microscopy (HRTEM). DLN films contain Si 3N 4, SiC and SiO x nanoparticles (sizes ~ 6-30 nm) within amorphous matrix which reduce the compressive stress of the films and increase the adhesiveness between the films and substrates. The biocompatibility of the films is verified using cell adhesion and morphology studies of the DLN films. We have also observed the fluorescence emission from the nanoparticles of the films. The biocompatibility of DLN films is examined by the cell viability test. This article emphasizes on the possible biomedical applications of prepared films like biosensors for diagnostics and therapies, surgical instruments, prosthetic replacements etc. Chemically modified DLN surface can be act as a sensing trace of gases to detect biomolecules in biological research. © 2012 by American Scientific Publishers.