The problem of scattering of Rayleigh waves at a rectangular groove is addressed. Grooves are known to excite bulk waves upon scattering and, hence, are potential sources (albeit secondary) in bulk-acoustic-wave (BAW) devices. Herein the groove is formulated as a volume perturbation of the geometry. Modal method is used and the results of Rayleigh wave reflection as well as bulk wave radiation are obtained and compared with the results available in the literature. The method as such is also compared with the boundary perturbation formulation. © 1992 IEEE